Cacade Microtech SUMMIT 12742B - 6 , Probe Station, 6", Semi-auto,
PicoGuard Thermal, MicroChamber, (Gold)
The system includes:
Integrated MicroChamber (Dark, Dry & EMI-Shielding)
Roll-out wafer stage (for safe/easy wafer loading)
PicoGuard triaxial thermal chuck (range: -65 to 200°C)
Auxiliary Chucks (2)
High stability platen with linear lift
3-axis precision motorized stage
Nucleus Prober Control Software
User Guides, Tools, and accessories
Universal Power cord Kit
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